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The Create Via Button: Create Standard Via Variant
The Create Via button in the Edit Menu brings up the Via Creation panel, if standard vias are defined in the current
technology. If no standard vias are defined, the menu entry will be
grayed, and the panel will not be available. This will be the case
for the example scmos and other technology files provided. The
xic_tech.demo technology file found with the memory chip
examples does provide standard via definitions, should the user wish
to try this feature.
The panel will also appear if the user clicks on a selected instance
of a standard via with the Ctrl key held. The instance can be
reparented to a master with a different parameter set.
The panel contans a number of entry areas, corresponding to the
standard via parameters as described below. Of these, the numerical
parameters can be changed by the user to create variants. The fields
that contain layer names can not be changed, except by creating a new
standard via definition. Presently, this must be done by editing the
technology file.
Each row of the panel contains a description and two entry areas, as
most of the entries have separate values for X and Y directions.
Dimensions are in microns.
- Via name, cut layer
This row contains two menus, which together provide access to all of
the available standard via definitions. The menu on the right
provides the process layer names that are used as ``cuts''. These are
the layers that represent holes in an insulating layer, generally
called ``via layers''. The menu on the left provides the names of
standard vias defined which use that via layer. Most often, there is
only one such definition, for a metal to metal contact. In other
cases, one of the ``conductors'' may be an implanted area, in which
case there may be several choices. When the user selects a standard
via using these menus, the other fields in the panel will be set to
the default values for the various parameters.
- Layer 1, Layer 2
These are the layer names of the two layers to be connected by the
via. These can not be changed by the user, except by selecting
another standard via. In Xic, Layer 1, and the `1'
designation in general, corresponds to the bottom conductor.
- Cut width, height
The ``cut'' is the feature on the via layer that actually forms the
contact. In a standard via, this is always rectangular. In a
semiconductor process, this is almost always a square of a fixed size.
Although the two dimensions can be changed by the user, one must be
aware of the relevant design rules before doing so.
- Cut rows, columns
In order to lower contact resistance and handle higher current, the
cut structure can be arrayed. In some situations it may be possible
to simply increase the size of a single cut, but in more advanced
processing the cut size is fixed and arrays are used. This is
probably the most common variant.
- Cut spacing X,Y
This is the space between cut edges (not center-to-center) in the X
and Y directions. This is only useful if the cut is arrayed. In
general, the two values are the same, and fixed at a minimum from a
design rule. The values should be changed only with knowledge of the
appropriate design rules.
- Enclosure 1 X,Y
In addition to the cut, the via will also contain squares of the two
metal layers. The ``Enclosure'' is the distance the metal layer
overhangs the cut. The two numbers apply to the bottom layer, in the
X and Y directions. The two numbers are typically set to a design
rule minimum, and should be changed only with knowledge of the design
rules involved.
- Offset 1 X,Y
If the offset parameters are zero, the metal rectangle is centered on
the cut. One can set the offset to a nonzero value, which will move
the center of the metal rectangle relative to the center of the cut.
This entry applies to the bottom conductor. These entries are almost
always zero.
- Enclosure 2 X,Y
As for Enclosure 1, but the values apply to the top conductor.
- Offset 2 X,Y
As for Offset 1, but the values apply to the top conductor.
- Origin offset X,Y
This is the origin of the sub-master coordinate system, which if zero
is centered on the cut array. This is the same as Virtuoso, but
appears to differ from the OpenAccess specification which seems to
indicate that the origin is centered on the lower-left cut element.
All features of the via are drawn relative to this offset, so there
are no design rule implications. These values are most often zero.
- Implant 1, Implant 2
Up to two additional rectangles can be drawn in the via, representing
implant areas. These may apply when contacting activated substrate
areas, where additional spacing rules to an implant region edge may
apply. If defined in the standard via definition, one or both of
these entries may contain an implant layer name. If not, the entry
area is grayed. The layer names can not be changed by the user,
except by selecting another standard via.
- Implant 1 enc X,Y
If an Implant 1 layer is present, these entries will contain the
enclosure values of the implant 1 layer rectangle relative to the
bottom conductor rectangle. That is, the implant 1 rectangle will
overhang the bottom conductor rectangle in the X and Y directions by
the values given.
- Implant 2 enc X,Y
If an Implant 2 layer is present, these entries will contain the
enclosure values of the implant 2 layer rectangle relative to the top
conductor rectangle. That is, the implant 2 rectangle will overhang
the top conductor rectangle in the X and Y directions by the values
given.
The easiest way to understand the effect of these parameters is to
create some vias.
Entering the parameters has no effect until the Apply button is
pressed. When Apply is pressed, a new internal sub-master cell
for the variant is created if necessary, and the via structure is
ghost-drawn and attached to the mouse pointer. Instances of the via
will be placed where the user clicks in a drawing window. As for
normal subcells, the current transform will be applied to the via.
Most process rules will not accept 45-degree rotations. The placement
mode can be exited by pressing the Esc key.
Next: The Flatten Button: Flatten
Up: The Edit Menu: Edit
Previous: The Create Cell Button:
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Stephen R. Whiteley
2024-09-29