next up previous contents index
Next: Tips and Hints Up: The Inductance/Resistance Extraction Interface Previous: Technology File Setup   Contents   Index

Output File

The output file is a FastHenry input file, with format as documented in the original FastHenry manual, potentially with the extensions for superconductivity support (lambda specifications) if the Lambda parameter is given to any layer used (making it a superconductor). Such constructs are not compatible with the original MIT FastHenry, but require the Whiteley Research version, or a derivative.

At the top of the file is a comment containing the layer sequence. For example:

* Layers           Plane        Thickness    EpsRel
* Substrate                     75.000       11.900
* Insulator CO     0.000        0.190        4.200
* Insulator VIA1   0.190        0.095        2.900
* Insulator VIA2   0.285        0.095        2.900
* Insulator VIA3   0.380        0.095        2.900
* Conductor M4     0.475        0.220
* Insulator VIA4   0.695        0.095        2.900
* Conductor M5     0.790        0.220
* Insulator VIA5   1.010        0.095        2.900
* Conductor M6     1.105        0.220
* Insulator VIA6   1.325        0.095        2.900
* Insulator VIA7   1.420        0.610        4.200
* Insulator VIA8   2.030        0.610        4.200

The Plane is the base elevation of the mask objects of a planarizing layer, that is, the top surface of the layer minus the layer thickness value. This field will be empty for non-planarizing layers.



Stephen R. Whiteley 2017-03-22