The output file is a unified FasterCap list file. At the top of the file is a comment containing the layer sequence. For example:
* Layers Plane Thickness EpsRel * Substrate 75.000 11.900 * Insulator CO 0.000 0.190 4.200 * Insulator VIA1 0.190 0.095 2.900 * Insulator VIA2 0.285 0.095 2.900 * Insulator VIA3 0.380 0.095 2.900 * Conductor M4 0.475 0.220 * Insulator VIA4 0.695 0.095 2.900 * Conductor M5 0.790 0.220 * Insulator VIA5 1.010 0.095 2.900 * Conductor M6 1.105 0.220 * Insulator VIA6 1.325 0.095 2.900 * Insulator VIA7 1.420 0.610 4.200 * Insulator VIA8 2.030 0.610 4.200
The Plane is the base elevation of the mask objects of a planarizing layer, that is, the top surface of the layer minus the layer thickness value. This field will be empty for non-planarizing layers.