The output file is a FastHenry input file, with format as documented in the original FastHenry manual, potentially with the extensions for superconductivity support (lambda specifications) if the Lambda parameter is given to any layer used (making it a superconductor). Such constructs are not compatible with the original MIT FastHenry, but require the Whiteley Research version, or a derivative.
At the top of the file is a comment containing the layer sequence. For example:
* Layers Plane Thickness EpsRel * Substrate 75.000 11.900 * Insulator CO 0.000 0.190 4.200 * Insulator VIA1 0.190 0.095 2.900 * Insulator VIA2 0.285 0.095 2.900 * Insulator VIA3 0.380 0.095 2.900 * Conductor M4 0.475 0.220 * Insulator VIA4 0.695 0.095 2.900 * Conductor M5 0.790 0.220 * Insulator VIA5 1.010 0.095 2.900 * Conductor M6 1.105 0.220 * Insulator VIA6 1.325 0.095 2.900 * Insulator VIA7 1.420 0.610 4.200 * Insulator VIA8 2.030 0.610 4.200
The Plane is the base elevation of the mask objects of a planarizing layer, that is, the top surface of the layer minus the layer thickness value. This field will be empty for non-planarizing layers.